The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 29, 2022
Filed:
Dec. 05, 2017
Applicant:
Wacker Chemie Ag, Munich, DE;
Inventors:
Olaf Seifarth, Burghausen, DE;
Stefan Sommerauer, Ostermiething, AT;
Markus Wenzeis, Wurmannsquick, DE;
Assignee:
WACKER CHEMIE AG, Munich, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); G06T 7/62 (2017.01); G01J 5/48 (2022.01); G06T 7/00 (2017.01); C23C 16/24 (2006.01); C23C 16/44 (2006.01); G01J 5/00 (2022.01);
U.S. Cl.
CPC ...
H01L 21/67248 (2013.01); G01J 5/48 (2013.01); G06T 7/0004 (2013.01); G06T 7/62 (2017.01); C23C 16/24 (2013.01); C23C 16/4411 (2013.01); G01J 5/0007 (2013.01); G06T 2207/30148 (2013.01);
Abstract
Siemens process rod growth is controlled by measuring rod diameter by a measuring system A and measuring rod temperature by a measuring system B, the two measuring systems located at different positions outside the reactor.