The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 29, 2022
Filed:
Nov. 09, 2021
Applicant:
Ebara Corporation, Tokyo, JP;
Inventors:
Takafumi Sekine, Tokyo, JP;
Kazutomo Miyazaki, Tokyo, JP;
Assignee:
EBARA CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01D 47/06 (2006.01); B01D 53/75 (2006.01); B01D 53/78 (2006.01); B01D 53/79 (2006.01);
U.S. Cl.
CPC ...
B01D 53/78 (2013.01); B01D 47/063 (2013.01); B01D 53/75 (2013.01); B01D 53/79 (2013.01); B01D 2258/01 (2013.01);
Abstract
A process gas suction structure for preventing a generation of products from a process gas due to a temperature drop is disclosed. The process gas suction structure includes a double tube structure, and a heating device configured to heat the double tube structure. The double tube structure includes a process-gas flow passage portion where the process gas flows, and a partition portion arranged outside of the process-gas flow passage portion.