The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 22, 2022
Filed:
Jul. 02, 2020
Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;
Ren-Chyi You, Yilan County, TW;
An-Wei Peng, Hsinchu, TW;
Chang-Zong Liu, Hsinchu, TW;
Yuang-Tsung Chen, Hualien County, TW;
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., Hsinchu, TW;
Abstract
A method is disclosed that includes the operations below: determining, by a processing unit, that arrival times of a lot arrived at N process stages are less than processing times of the lot predetermined to be processed at the N process stages, N being a positive integer; comparing, by the processing unit, idle times of multiple tools in the N process stages; and processing the lot with a first tool of the tools at each one of the N process stages, wherein the first tool of the tools has a shortest idle time.