The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 22, 2022

Filed:

Mar. 25, 2020
Applicant:

Infineon Technologies Ag, Neubiberg, DE;

Inventors:

Thomas Grille, Villach, AT;

Cristina Consani, Villach, AT;

Peter Irsigler, Obernberg/Inn, AT;

Bernhard Jakoby, Linz, AT;

Thomas Krotscheck Ostermann, Koestenberg, AT;

Gerald Puehringer, Linz, AT;

Christian Ranacher, Gaimberg, AT;

Andreas Tortschanoff, Villach, AT;

Assignee:

INFINEON TECHNOLOGIES AG, Neubiberg, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 31/0232 (2014.01); H01L 31/0368 (2006.01); H01L 31/16 (2006.01); H01L 31/18 (2006.01); G01N 21/3518 (2014.01); H01L 31/0216 (2014.01);
U.S. Cl.
CPC ...
G01N 21/3518 (2013.01); H01L 31/0216 (2013.01); H01L 31/02327 (2013.01); H01L 31/03682 (2013.01); H01L 31/16 (2013.01); H01L 31/182 (2013.01); G01N 2201/0686 (2013.01); G01N 2201/0833 (2013.01);
Abstract

A fluid sensor includes a substrate having a top main surface region, wherein the top main surface region of the substrate forms a common system plane of the fluid sensor, a thermal radiation emitter on the top main surface region of the substrate, an optical filter structure on the top main surface region of the substrate, a waveguide on the main top surface region of the substrate, and a thermal radiation detector on the top main surface region of the substrate, wherein the thermal radiation detector provides a detector output signal based on a radiation strength of the filtered thermal radiation received from the waveguide.


Find Patent Forward Citations

Loading…