The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 22, 2022

Filed:

Sep. 11, 2018
Applicant:

Fujikin Incorporated, Osaka, JP;

Inventors:

Kenta Kondo, Osaka, JP;

Toshihide Yoshida, Osaka, JP;

Kenji Aikawa, Osaka, JP;

Hidenobu Sato, Osaka, JP;

Tomohiro Nakata, Osaka, JP;

Tsutomu Shinohara, Osaka, JP;

Masahiko Takimoto, Osaka, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F16K 1/52 (2006.01); C23C 16/455 (2006.01); F16K 31/122 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
F16K 1/52 (2013.01); C23C 16/45544 (2013.01); F16K 31/1221 (2013.01); H01L 21/67017 (2013.01);
Abstract

A valve device is capable of precisely adjusting a flow rate variation due to aging, aging, etc. without using an external sensor. An adjusting actuator includes a piezoelectric element for adjusting the position of the operating member positioned at the open position, and the drive circuit of the adjusting actuator includes a detecting unit for detecting an electric signal related to the amount of strain generated in the piezoelectric element, and a control unit for controlling the adjusting actuator so that the opening degree of the flow path by the valve element becomes the target opening degree based on the electric signal related to the amount of strain of the piezoelectric element.


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