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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11502195 B1

PDFFull Text
Date of Patent:
Nov. 15, 2022

Filed:

Sep. 03, 2020

Semiconductor structure and manufacturing method thereof

Applicant:

Nuvoton Technology Corporation, Hsinchu, TW;

Inventors:

Ching-San Wang, Hsinchu, TW;

Kuang-Chu Chen, Hsinchu, TW;

Peng-Chan Hsiao, Hsinchu, TW;

Han-Ying Liu, Hsinchu, TW;

Assignee:

Nuvoton Technology Corporation, Hsinchu, TW;

Attorney:

JCIPRNET

Primary Examiner:

Igwe U Anya

Int. Cl.
CPC ...
H01L 29/78 (2006.01); H01L 29/20 (2006.01); H01L 29/66 (2006.01); H01L 21/02 (2006.01); H01L 29/423 (2006.01);
U.S. Cl.
CPC ...
H01L 29/7842 (2013.01); H01L 21/0254 (2013.01); H01L 29/2003 (2013.01); H01L 29/4236 (2013.01); H01L 29/66734 (2013.01); H01L 29/7813 (2013.01);
Abstract

A semiconductor structure and a manufacturing method of the semiconductor structure are provided. The semiconductor structure includes a substrate and a III-V group compound layer disposed on the substrate. The III-V group compound layer has n trenches vertically communicating with each other, and n≥2. Widths of the n trenches gradually decrease from the width of the uppermost first trench to the width of the lowermost ntrench, and the ntrench exposes a portion of the substrate.

Find Patent Forward Citations

Wang, Ching-San. (2022). Semiconductor structure and manufacturing method thereof (U.S. Patent No. 11502195). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11502195

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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