The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 15, 2022

Filed:

Dec. 19, 2017
Applicant:

Tanaka Kikinzoku Kogyo K.k., Tokyo, JP;

Inventors:

Yohei Mizuno, Tomioka, JP;

Tetsuya Kato, Tomioka, JP;

Chiharu Ishikura, Tomioka, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/285 (2006.01); H01L 29/40 (2006.01); H01L 29/417 (2006.01); H01L 29/45 (2006.01); C22C 5/06 (2006.01); C23C 14/14 (2006.01); C23C 14/58 (2006.01); H01J 37/34 (2006.01);
U.S. Cl.
CPC ...
H01L 21/28568 (2013.01); C22C 5/06 (2013.01); C23C 14/14 (2013.01); C23C 14/5806 (2013.01); H01J 37/3426 (2013.01); H01L 29/401 (2013.01); H01L 29/41741 (2013.01); H01L 29/45 (2013.01);
Abstract

An electrode structure of a back electrode including metal layers laminated in the following order: a Ti layer, a Ni layer, and a Ag alloy layer. The Ag alloy layer includes an Ag alloy and an addition metal M selected from Sn, Sb, and Pd. The electrode structure is configured such that when subjected to elemental analysis with an X-ray photoelectron spectrometer in the depth direction from the Ag alloy layer to the Ni layer, on the boundary between the Ni layer and the Ag alloy layer, an intermediate region where spectra derived from all the metals, Ni, Ag, and the addition element M, can be detected is observable, and, when each metal content in the intermediate region is converted based on the spectra derived from all the metals Ni, Ag, and the addition element M, the maximum of the addition element M content is 5 at % or more.


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