The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 15, 2022

Filed:

Jun. 05, 2020
Applicant:

Carl Zeiss Microscopy Gmbh, Jena, DE;

Inventors:

Luyang Han, Heidenheim, DE;

Martin Edelmann, Aalen, DE;

Josef Biberger, Wildenberg, DE;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/22 (2006.01); H01J 37/26 (2006.01); H01J 37/244 (2006.01); G01N 3/06 (2006.01); G06T 7/11 (2017.01); G06T 7/00 (2017.01);
U.S. Cl.
CPC ...
H01J 37/222 (2013.01); G01N 3/06 (2013.01); G06T 7/11 (2017.01); G06T 7/97 (2017.01); H01J 37/244 (2013.01); H01J 37/26 (2013.01); G06T 2207/10061 (2013.01); G06T 2207/20092 (2013.01); H01J 2237/2001 (2013.01); H01J 2237/221 (2013.01); H01J 2237/2487 (2013.01); H01J 2237/25 (2013.01); H01J 2237/30 (2013.01); H01J 2237/30411 (2013.01);
Abstract

A method of operating a particle beam device for imaging, analyzing and/or processing an object may be carried out, for example, by a particle beam device. The method may include: identifying at least one region of interest on the object; defining: (i) an analyzing sequence for analyzing the object, (ii) a processing sequence for processing the object by deformation and (iii) an adapting sequence for adapting the at least one region of interest depending on the processing sequence and/or on the analyzing sequence; processing the object by deformation according to the processing sequence and/or analyzing the object according to the analyzing sequence; adapting the at least one region of interest according to the adapting sequence; and after or while adapting the at least one region of interest, imaging and/or analyzing the at least one region of interest using a primary particle beam being generated by a particle beam generator.


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