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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11499226 B1

PDFFull Text
Date of Patent:
Nov. 15, 2022

Filed:

Nov. 01, 2019

Substrate supporting unit and a substrate processing device including the same

Applicant:

Asm Ip Holding B.v., Almere, NL;

Inventors:

SeungHwan Lee, Anseong-si, KR;

HakYong Kwon, Hwaseong-si, KR;

JongSu Kim, Hwaseong-si, KR;

SungBae Kim, Cheonan-si, KR;

JuHyuk Park, Asan-si, KR;

Assignee:

ASM IP Holding B.V., Almere, NL;

Attorney:

Snell & Wilmer L.L.P.

Primary Examiner:

Yuechuan Yu

Int. Cl.
CPC ...
C23C 16/455 (2006.01); H01J 37/32 (2006.01); H01L 21/67 (2006.01); H01L 21/673 (2006.01); C23C 16/458 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45544 (2013.01); C23C 16/458 (2013.01); C23C 16/45536 (2013.01); H01J 37/32082 (2013.01); H01L 21/673 (2013.01); H01L 21/67017 (2013.01);
Abstract

A substrate processing device capable of preventing deformation of a substrate during a process includes a substrate supporting unit having a contact surface that comes into contact with an edge of a substrate to be processed, wherein the substrate supporting unit includes a protruding (e.g. embossed) structure protruding from a base to support deformation from the inside of the edge of the substrate to be processed.

Find Patent Forward Citations

Lee, SeungHwan. (2022). Substrate supporting unit and a substrate processing device including the same (U.S. Patent No. 11499226). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11499226

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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