The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 08, 2022
Filed:
Feb. 13, 2020
Applicant:
Kla Corporation, Milpitas, CA (US);
Inventors:
Katerina Ioakeimidi, San Francisco, CA (US);
Gildardo R. Delgado, Livermore, CA (US);
Frances Hill, Sunnyvale, CA (US);
Gary V. Lopez Lopez, Sunnyvale, CA (US);
Miguel A. Gonzalez, Livermore, CA (US);
Alan D. Brodie, Palo Alto, CA (US);
Assignee:
KLA CORPORATION, Milpitas, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 1/34 (2006.01); H01J 37/317 (2006.01); G02B 5/00 (2006.01);
U.S. Cl.
CPC ...
H01J 1/34 (2013.01); G02B 5/008 (2013.01); H01J 37/3177 (2013.01); H01J 2201/3423 (2013.01); H01J 2201/3425 (2013.01);
Abstract
A photocathode emitter can include a transparent substrate, a photocathode layer, and a plasmonic structure array disposed between the transparent substrate and the photocathode layer. The plasmonic structure can serve as a spot-confining structure and an electrical underlayer for biasing the photocathode. The plasmonic structure can confine the incident light at subwavelength sizes.