The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 08, 2022

Filed:

Nov. 29, 2017
Applicant:

SK Holdings Co., Ltd., Seoul, KR;

Inventors:

Hang Duk Jung, Seoul, KR;

Yong Sik Moon, Seongnam-si, KR;

Myung Seung Son, Seoul, KR;

Min Hwan Lee, Gwangju-si, KR;

Jun Taek Park, Yongin-si, KR;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/66 (2006.01); G06N 3/08 (2006.01); G06K 9/62 (2022.01); G06N 3/04 (2006.01); G05B 15/02 (2006.01); G05B 17/02 (2006.01);
U.S. Cl.
CPC ...
G06N 3/08 (2013.01); G05B 15/02 (2013.01); G05B 17/02 (2013.01); G06K 9/6256 (2013.01); G06N 3/04 (2013.01); H01L 22/12 (2013.01); H01L 22/20 (2013.01);
Abstract

Provided is a machine learning-based semiconductor manufacturing yield prediction system and method. A result prediction method according to an embodiment of the present invention comprises: learning different neural network models by classifying different types of data according to their types and respectively inputting the classified different types of data to the different neural network models; and predicting result values by classifying input data according to their types and respectively inputting the classified input data to different neural network models. Therefore, it is possible to apply different neural network models to respective data according to their types, thereby ensuring a neural network model having a structure appropriate for the characteristics of each type of data and thus accurately predicting a result value.


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