The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 08, 2022
Filed:
Jul. 03, 2019
Applicant:
Korea Research Institute of Standards and Science, Daejeon, KR;
Inventors:
Assignee:
Korea Research Institute of Standards and Science, Daejeon, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 21/21 (2006.01); G01B 11/27 (2006.01); G01N 21/13 (2006.01);
U.S. Cl.
CPC ...
G01N 21/211 (2013.01); G01B 11/272 (2013.01); G01N 21/13 (2013.01); G01N 2021/213 (2013.01); G01N 2201/0231 (2013.01); G01N 2201/0612 (2013.01); G01N 2201/0633 (2013.01); G01N 2201/0636 (2013.01); G01N 2201/0683 (2013.01);
Abstract
The present invention relates to a normal incidence ellipsometer and a method for measuring the optical properties of a sample by using same. The purpose of the present invention is to provide: a normal incidence ellipsometer in which a wavelength-dependent compensator is replaced with a wavelength-independent linear polarizer such that equipment calibration procedures are simplified while a measurement wavelength range expansion can be easily implemented; and a method for measuring the optical properties of a sample by using same.