The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 01, 2022
Filed:
Mar. 29, 2019
Nikkiso Co., Ltd., Tokyo, JP;
Scivax Corporation, Kawasaki, JP;
Noritaka Niwa, Hakusan, JP;
Tetsuhiko Inazu, Hakusan, JP;
Yasumasa Suzaki, Kawasaki, JP;
Akifumi Nawata, Kawasaki, JP;
Satoru Tanaka, Kawasaki, JP;
NIKKISO CO., LTD., Tokyo, JP;
SCIVAX CORPORATION, Kawasaki, JP;
Abstract
A semiconductor light emitting device includes a light extraction layer having a light extraction surface. The light extraction layer includes: a plurality of cone-shaped parts formed in an array on the light extraction surface, and a plurality of granular parts formed both on a side part of the cone-shaped part and in a space between adjacent cone-shaped parts. A method of manufacturing the semiconductor light emitting device includes: forming a mask having an array pattern on the light extraction layer; and etching the mask and the light extraction layer from above the mask. The etching includes first dry-etching performed until an entirety of the mask is removed and second dry-etching performed to further dry-etch the light extraction layer after the mask is removed.