The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 01, 2022

Filed:

Sep. 29, 2020
Applicant:

Socionext Inc., Kanagawa, JP;

Inventors:

Akio Hara, Kanagawa, JP;

Toyoji Sawada, Kanagawa, JP;

Masaki Okuno, Kanagawa, JP;

Hirosato Ochimizu, Kanagawa, JP;

Assignee:

Socionext Inc., Kanagawa, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/58 (2006.01); H01L 23/522 (2006.01);
U.S. Cl.
CPC ...
H01L 23/585 (2013.01); H01L 23/5226 (2013.01);
Abstract

A semiconductor device includes a substrate having a circuit region and a peripheral region disposed around and enclosing the circuit region in a plan view, a first interconnect layer formed on the substrate, a second interconnect layer formed on the first interconnect layer, a third interconnect layer formed on the second interconnect layer, and a guard ring formed in the peripheral region, wherein the guard ring includes a first interconnect formed in the first interconnect layer, and disposed around and enclosing the circuit region in a plan view, a second interconnect formed in the third interconnect layer, and disposed around and enclosing the circuit region in a plan view, and a first via connected to the first interconnect and to the second interconnect, and disposed in a groove shape along a perimeter edge of the substrate in a plan view.


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