The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 01, 2022
Filed:
Jan. 29, 2021
Applicant:
Ev Group E. Thallner Gmbh, St. Florian am Inn, AT;
Inventors:
Thomas Wagenleitner, Aurolzmunster, AT;
Dominik Zinner, Zell an der Pram, AT;
Jurgen Markus Suss, Rainbach, AT;
Christian Sinn, Andorf, AT;
Jurgen Mallinger, Senftenbach, AT;
Assignee:
EV Group E. Thallner GmbH, St. Florian am Inn, AT;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 21/68 (2006.01); H01L 21/67 (2006.01); H01L 23/544 (2006.01); H01L 21/683 (2006.01);
U.S. Cl.
CPC ...
H01L 21/681 (2013.01); H01L 21/67092 (2013.01); H01L 21/67259 (2013.01); H01L 23/544 (2013.01); H01L 21/67121 (2013.01); H01L 21/67144 (2013.01); H01L 21/6838 (2013.01); H01L 2223/5442 (2013.01); H01L 2223/54426 (2013.01);
Abstract
A method for aligning and contacting a first substrate with a second substrate using a plurality of detection units and a corresponding device for alignment and contact.