The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 01, 2022

Filed:

Jul. 16, 2018
Applicant:

Robert Bosch Gmbh, Stuttgart, DE;

Inventors:

Friedjof Heuck, Stuttgart, DE;

Mike Schwarz, Kusterdingen, DE;

Thomas Friedrich, Moessingen-Oeschingen, DE;

Volkmar Senz, Metzingen, DE;

Assignee:

Robert Bosch GmbH, Stuttgart, DE;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01L 19/06 (2006.01); B81B 3/00 (2006.01); G01L 9/00 (2006.01); B81B 7/00 (2006.01); G01R 27/26 (2006.01); G01L 19/14 (2006.01); G01N 27/12 (2006.01); G01N 33/18 (2006.01); G01N 27/04 (2006.01); G01N 27/22 (2006.01);
U.S. Cl.
CPC ...
G01L 9/0073 (2013.01); B81B 3/0051 (2013.01); B81B 7/0016 (2013.01); G01L 19/0618 (2013.01); G01L 19/0654 (2013.01); G01L 19/146 (2013.01); G01R 27/2605 (2013.01); B81B 2201/0264 (2013.01); B81B 2203/0163 (2013.01); G01N 27/048 (2013.01); G01N 27/223 (2013.01); G01N 2291/02845 (2013.01);
Abstract

A micromechanical device that includes a carrier substrate; a sensor device that is situated on the carrier substrate and spaced apart from a surface section of the carrier substrate with the aid of spring elements in such a way that the sensor device is oscillatable relative to the surface section; and at least one stopper element, situated on the sensor device and/or on the surface section of the carrier substrate, which limits a deflection of the sensor device in the direction of the surface section.


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