The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 25, 2022

Filed:

Oct. 13, 2020
Applicant:

Fujian Jinhua Integrated Circuit Co., Ltd., Quanzhou, CN;

Inventor:

Gang-Yi Lin, Taitung County, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/308 (2006.01); H01L 21/762 (2006.01); H01L 21/033 (2006.01); H01L 27/02 (2006.01); H01L 29/06 (2006.01);
U.S. Cl.
CPC ...
H01L 21/3086 (2013.01); H01L 21/0337 (2013.01); H01L 21/76224 (2013.01); H01L 27/0207 (2013.01); H01L 29/0649 (2013.01);
Abstract

The invention discloses an active region structure and a manufacturing method thereof, which also comprises a edge portion around the active region, so that the stress generated by the shallow trench insulation layer in the peripheral area on the active region can be blocked, and the component unit in the peripheral edge area of the active region can be prevented from being damaged due to stress. In addition, the edge portion includes branches extending into the active region, and the branches extend in at least two different directions, which can compensate the uneven stress at the end between the active lines and avoid the damage of the component unit.


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