The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 25, 2022

Filed:

Sep. 09, 2020
Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;

Inventors:

Kang-Heng Ma, Hsinchu, TW;

Ching-Hsi Nan, Hsinchu, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06F 30/30 (2020.01); G05B 19/4063 (2006.01); G05B 19/418 (2006.01); G05B 23/02 (2006.01); G06F 3/0481 (2022.01); G06F 11/00 (2006.01);
U.S. Cl.
CPC ...
G06F 30/30 (2020.01); G05B 19/4063 (2013.01); G05B 19/41875 (2013.01); G05B 23/0235 (2013.01); G05B 2219/45031 (2013.01); G06F 3/0481 (2013.01); G06F 11/008 (2013.01);
Abstract

A method includes, for a first tool-log variable of a set of tool-log variables, comparing a first tool-log variable result from a first integrated circuit (IC) manufacturing recipe to a first tool-log variable result from a second IC manufacturing recipe. The set of tool-log variables corresponds to one or more tool-logs generated from execution of the first IC manufacturing recipe and the second IC manufacturing recipe on an IC manufacturing tool. Based on the comparison, performing an operation of generating instructions to add one of the first IC manufacturing recipe or the second IC manufacturing recipe to an IC manufacturing recipe library, or performing an operation of generating a defense report for one of the first IC manufacturing recipe or the second IC manufacturing recipe.


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