The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 25, 2022
Filed:
Aug. 17, 2016
Applicant:
Eo Technics Co., Ltd., Anyang-si, KR;
Inventors:
Assignee:
EO TECHNICS CO., LTD., Gyeonggi-Do, KR;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F 1/82 (2012.01); B08B 7/00 (2006.01); G03F 1/64 (2012.01);
U.S. Cl.
CPC ...
B08B 7/0042 (2013.01); G03F 1/64 (2013.01); G03F 1/82 (2013.01); B08B 2220/01 (2013.01);
Abstract
Provided is an adhesive removing device for removing an adhesive for adhering a mask and a pellicle from the mask. The adhesive removing device includes: a laser irradiating unit configured to irradiate a laser beam to an adhesive layer formed between the mask and the pellicle; a controller configured to control a wavelength, a waveform, and an energy density of the laser beam, so as to remove the adhesive layer through emission of the laser beam; and an imaging unit configured to monitor a region to which the laser beam is irradiated.