The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 11, 2022

Filed:

Jul. 15, 2020
Applicant:

Psemi Corporation, San Diego, CA (US);

Inventors:

Abhijeet Paul, Poway, CA (US);

Simon Edward Willard, Irvine, CA (US);

Alain Duvallet, San Diego, CA (US);

Assignee:

pSemi Corporation, San Diego, CA (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/06 (2006.01); H01L 21/762 (2006.01); H01L 29/78 (2006.01); H01L 29/49 (2006.01); H01L 29/66 (2006.01); H01L 29/36 (2006.01); H01L 29/423 (2006.01); H01L 29/10 (2006.01);
U.S. Cl.
CPC ...
H01L 29/0607 (2013.01); H01L 21/76202 (2013.01); H01L 29/0649 (2013.01); H01L 29/1041 (2013.01); H01L 29/36 (2013.01); H01L 29/4238 (2013.01); H01L 29/42372 (2013.01); H01L 29/4916 (2013.01); H01L 29/4975 (2013.01); H01L 29/66545 (2013.01); H01L 29/78 (2013.01);
Abstract

FET designs that exhibit low leakage in the presence of the edge transistor phenomenon. Embodiments includes nFET designs in which the work function Φof the gate structure overlying the edge transistors of the nFET is increased by forming extra P+ implant regions within at least a portion of the gate structure, thereby increasing the Vt of the edge transistors to a level that may exceed the Vt of the central conduction channel of the nFET. In some embodiments, the gate structure of the nFET is modified to increase or 'flare' the effective channel length of the edge transistors relative to the length of the central conduction channel of the FET. Other methods of changing the work function Φof the gate structure overlying the edge transistors are also disclosed. The methods may be adapted to fabricating pFETs by reversing or substituting material types.


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