The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 11, 2022
Filed:
Aug. 28, 2019
Applicant:
Asml Netherlands B.v., Veldhoven, NL;
Inventor:
Johannes Jacobus Matheus Baselmans, Oirschot, NL;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); G03F 9/00 (2006.01); G02B 27/14 (2006.01); G02B 27/28 (2006.01);
U.S. Cl.
CPC ...
G03F 7/7085 (2013.01); G02B 27/141 (2013.01); G02B 27/283 (2013.01); G03F 7/70683 (2013.01); G03F 9/7065 (2013.01); G03F 9/7088 (2013.01);
Abstract
A radiation system comprising a radiation source and a radiation conditioning apparatus, wherein the radiation source is configured to provide a radiation beam with wavelengths which extend from ultraviolet to infrared, and wherein the radiation conditioning apparatus is configured to separate the radiation beam into at least two beam portions and is further configured to condition the at least two beam portions differently.