The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 11, 2022
Filed:
May. 22, 2020
Applicant:
Samsung Electronics Co., Ltd., Suwon-si, KR;
Inventors:
Soyoung Lee, Suwon-si, KR;
Seungmin Ryu, Hwaseong-si, KR;
Gyuhee Park, Hwaseong-si, KR;
Jaesoon Lim, Seoul, KR;
Younjoung Cho, Hwaseong-si, KR;
Akio Saito, Tokyo, JP;
Wakana Fuse, Tokyo, JP;
Yutaro Aoki, Tokyo, JP;
Takanori Koide, Tokyo, JP;
Assignees:
SAMSUNG ELECTRONICS CO., LTD., Suwon-si, KR;
ADEKA CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C07F 17/00 (2006.01); C09D 1/00 (2006.01); C01B 21/06 (2006.01); H01L 21/28 (2006.01); H01L 49/02 (2006.01); H01L 21/285 (2006.01);
U.S. Cl.
CPC ...
C07F 17/00 (2013.01); C01B 21/0617 (2013.01); C09D 1/00 (2013.01); C01P 2006/40 (2013.01); H01L 21/28088 (2013.01); H01L 21/28568 (2013.01); H01L 28/60 (2013.01);
Abstract
A niobium compound and a method of forming a thin film using the niobium compound, the compound being represented by the following General formula I: