The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 11, 2022
Filed:
May. 16, 2019
Applicant:
Fujifilm Sonosite, Inc., Bothell, WA (US);
Inventors:
Gregg Frey, Issaquah, WA (US);
Wei Li, Bothell, WA (US);
Assignee:
FUJIFILM SONOSITE, INC., Bothell, WA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B06B 1/06 (2006.01); H01L 41/047 (2006.01); H01L 41/09 (2006.01);
U.S. Cl.
CPC ...
B06B 1/0685 (2013.01); H01L 41/0472 (2013.01); H01L 41/0973 (2013.01); B06B 2201/55 (2013.01);
Abstract
A PMUT ultrasound transducer includes a number of PMUT transmitting elements in a membrane layer. Behind each PMUT transmitting element is a cavity in the membrane layer. The cavities are partially or completely filled with a damping material to reduce ringing of the PMUT transmitting elements. Suitable damping materials include polymers, e.g., soft epoxies, benzocyclobutene or polyimide that are dispersed into the cavities or a phase changing material such as Parylene that precipitates out of a gas phase as a polymer when cured.