The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 11, 2022
Filed:
Jan. 31, 2020
Applicant:
Entegris, Inc., Billerica, MA (US);
Inventors:
James Hamzik, North Billerica, MA (US);
Jad A. Jaber, Westford, MA (US);
Justin Brewster, North Billerica, MA (US);
Nicholas J. Filipancic, Medford, MA (US);
Assignee:
ENTEGRIS, INC., Billerica, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01D 71/82 (2006.01); B01D 71/36 (2006.01); B01D 69/12 (2006.01); C02F 1/44 (2006.01); B01J 20/26 (2006.01); C09K 13/06 (2006.01); B01J 20/28 (2006.01); H01L 21/306 (2006.01); B01J 20/30 (2006.01); C02F 103/34 (2006.01); C02F 101/20 (2006.01);
U.S. Cl.
CPC ...
B01D 71/82 (2013.01); B01D 69/12 (2013.01); B01D 71/36 (2013.01); B01J 20/265 (2013.01); B01J 20/28016 (2013.01); B01J 20/28033 (2013.01); B01J 20/3085 (2013.01); C02F 1/44 (2013.01); C09K 13/06 (2013.01); H01L 21/30604 (2013.01); C02F 2101/20 (2013.01); C02F 2103/346 (2013.01);
Abstract
Described are filter materials including a polyol ligand, such as n-methylglucamine, and/or a polyphosphonic acid ligand, which are highly effective for filtering metals or metal ions from fluids. The filter materials can be particularly useful to filter basic and acidic fluid compositions, such as those used for wet etching, removing photoresist, and cleaning steps in microelectronic device manufacturing.