The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 04, 2022
Filed:
Mar. 26, 2019
Applicant:
Versum Materials Us, Llc, Tempe, AZ (US);
Inventors:
Richard Dalton Peters, Tempe, AZ (US);
Yuanmei Cao, Tempe, AZ (US);
Assignee:
VERSUM MATERIALS US, LLC, Tempe, AZ (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F 7/42 (2006.01); C11D 7/06 (2006.01); C11D 7/26 (2006.01); C11D 7/32 (2006.01); C11D 7/50 (2006.01); C11D 11/00 (2006.01);
U.S. Cl.
CPC ...
G03F 7/425 (2013.01); C11D 7/06 (2013.01); C11D 7/261 (2013.01); C11D 7/3209 (2013.01); C11D 7/3218 (2013.01); C11D 7/3227 (2013.01); C11D 7/5022 (2013.01); C11D 11/0047 (2013.01);
Abstract
Improved stripper solutions for removing photoresists from substrates are provided that exhibit improved compatibility with copper, leadfree solder, and epoxy-based molding compounds. The stripper solutions comprise a primary solvent, a secondary glycol ether solvent, potassium hydroxide, and an amine. The solutions also exhibit reduced potassium carbonate crystal formation compared to conventional formulations containing potassium hydroxide, and extended bath life compared to formulations containing tetramethylammonium hydroxide.