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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11460771 B1

PDFFull Text
Date of Patent:
Oct. 04, 2022

Filed:

Dec. 20, 2018

Protective film forming composition having an acetal structure

Applicant:

Nissan Chemical Corporation, Tokyo, JP;

Inventors:

Takafumi Endo, Toyama, JP;

Yasunobu Someya, Toyama, JP;

Takahiro Kishioka, Toyama, JP;

Assignee:

NISSAN CHEMICAL CORPORATION, Tokyo, JP;

Attorney:

Oliff PLC

Primary Examiner:

Caleen O Sullivan

Int. Cl.
CPC ...
G03F 7/004 (2006.01); G03F 7/11 (2006.01); G03F 7/20 (2006.01); H01L 21/027 (2006.01); H01L 21/308 (2006.01); C08L 29/14 (2006.01); C08K 5/06 (2006.01); C08K 5/00 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0045 (2013.01); C08K 5/0025 (2013.01); C08K 5/06 (2013.01); C08L 29/14 (2013.01); G03F 7/11 (2013.01); G03F 7/20 (2013.01); H01L 21/0274 (2013.01); H01L 21/3081 (2013.01); C08L 2203/16 (2013.01);
Abstract

A protective film-forming composition which protects against a semiconductor wet etching solution, contains a solvent and a compound or polymer thereof containing at least one acetal structure in a molecule thereof, and forms a protective film exhibiting excellent resistance against a semiconductor wet etching solution during the lithographic process when producing semiconductors; a method for producing a resist pattern-equipped substrate which uses the protective film; and a method for producing a semiconductor device.

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Endo, Takafumi. (2022). Protective film forming composition having an acetal structure (U.S. Patent No. 11460771). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11460771

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