The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 04, 2022

Filed:

Mar. 30, 2020
Applicant:

Fei Company, Hillsboro, OR (US);

Inventors:

Alexander Henstra, Eindhoven, NL;

Yuchen Deng, Eindhoven, NL;

Holger Kohr, Eindhoven, NL;

Assignee:

FEI Company, Hillsboro, OR (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 23/20 (2018.01); G01N 33/38 (2006.01); G03H 5/00 (2006.01); H01J 37/04 (2006.01); H01J 37/26 (2006.01); G01N 23/207 (2018.01);
U.S. Cl.
CPC ...
G01N 23/207 (2013.01); G01N 33/385 (2013.01); G03H 5/00 (2013.01); H01J 37/04 (2013.01); H01J 37/26 (2013.01); G01N 2223/0566 (2013.01); G01N 2223/064 (2013.01); G03H 2224/04 (2013.01); H01J 2237/2614 (2013.01);
Abstract

Methods for using electron diffraction holography to investigate a sample, according to the present disclosure include the initial steps of emitting a plurality of electrons toward the sample, forming the plurality of electrons into a first electron beam and a second electron beam, and modifying the focal properties of at least one of the two beams such that the two beams have different focal planes. Once the two beams have different focal planes, the methods include focusing the first electron beam such that it has a focal plane at or near the sample, and focusing the second electron beam so that it is incident on the sample, and has a focal plane in the diffraction plane. An interference pattern of the first electron beam and the diffracted second electron beam is then detected in the diffraction plane, and then used to generate a diffraction holograph.


Find Patent Forward Citations

Loading…