The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 27, 2022

Filed:

Jul. 31, 2019
Applicants:

Semiconductor Manufacturing International (Shanghai) Corporation, Shanghai, CN;

Semiconductor Manufacturing International (Beijing) Corporation, Beijing, CN;

Inventors:

Liang Chen, Shanghai, CN;

Shengfen Chiu, Shanghai, CN;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/11524 (2017.01); H01L 21/768 (2006.01); H01L 49/02 (2006.01); H01L 27/11529 (2017.01); H01L 27/11539 (2017.01); H01L 21/02 (2006.01); H01L 21/8234 (2006.01); H01L 21/8239 (2006.01); H01L 21/311 (2006.01); H01L 21/764 (2006.01); H01L 27/11534 (2017.01); H01L 29/06 (2006.01); H01L 29/788 (2006.01);
U.S. Cl.
CPC ...
H01L 27/11524 (2013.01); H01L 21/02164 (2013.01); H01L 21/02208 (2013.01); H01L 21/02271 (2013.01); H01L 21/02337 (2013.01); H01L 21/02343 (2013.01); H01L 21/02359 (2013.01); H01L 21/31116 (2013.01); H01L 21/764 (2013.01); H01L 21/7682 (2013.01); H01L 21/8239 (2013.01); H01L 21/823481 (2013.01); H01L 27/11529 (2013.01); H01L 27/11534 (2013.01); H01L 27/11539 (2013.01); H01L 28/00 (2013.01); H01L 29/0649 (2013.01); H01L 29/7883 (2013.01);
Abstract

A flash memory is provided and includes a substrate including a memory cell region; a memory transistor array including memory transistors and selecting transistors in the memory cell region; a functional layer covering outer surfaces of the memory transistors and selecting transistors, as well as surfaces of the substrate between adjacent memory transistors and selecting transistors; a dielectric layer covering top surfaces of the memory transistors and selecting transistors and fills gaps between each selecting transistor and a corresponding adjacent memory transistor; and air gaps formed between adjacent memory transistors. Each selecting transistor is used for selecting one column of memory transistors in the memory transistor array. The functional layer has a roughened surface capable of absorbing water. The air gaps in the flash memory are water vapor induced air gaps.


Find Patent Forward Citations

Chen, Liang. (2022). Flash memory containing air gaps (U.S. Patent No. 11456307). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11456307

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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