The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 27, 2022
Filed:
Mar. 04, 2022
Applicant:
Yield Engineering Systems, Inc., Fremont, CA (US);
Inventors:
M Ziaul Karim, San Jose, CA (US);
Lei Jing, Santa Clara, CA (US);
Kenneth Sautter, Sunnyvale, CA (US);
Assignee:
YIELD ENGINEERING SYSTEMS, INC., Freemont, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/00 (2006.01); B23K 1/008 (2006.01); B23K 37/04 (2006.01); B23K 101/40 (2006.01); B23K 101/42 (2006.01); B23K 1/015 (2006.01); B23K 1/012 (2006.01); B23K 1/00 (2006.01);
U.S. Cl.
CPC ...
H01L 24/75 (2013.01); B23K 1/008 (2013.01); B23K 37/0452 (2013.01); H01L 24/11 (2013.01); H01L 24/742 (2013.01); B23K 1/0016 (2013.01); B23K 1/012 (2013.01); B23K 1/015 (2013.01); B23K 2101/40 (2018.08); B23K 2101/42 (2018.08); H01L 24/74 (2013.01); H01L 2224/11849 (2013.01); H01L 2224/759 (2013.01); H01L 2224/7565 (2013.01); H01L 2224/75252 (2013.01); H01L 2224/75272 (2013.01); H01L 2224/75283 (2013.01); H01L 2224/75501 (2013.01); H01L 2224/75802 (2013.01);
Abstract
A method of using an oven includes supporting a substrate on a rotatable spindle in a processing chamber of the oven and rotating the substrate. The method may also include raising the spindle with the substrate to a heating zone and activating a lamp assembly to heat a top surface of the substrate. The substrate may then be lowered to a dosing zone and a chemical vapor directed into the processing chamber above the substrate. The substrate may then be further heated using the lamp assembly and cooled.