The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 20, 2022

Filed:

Jul. 29, 2020
Applicant:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsin-Chu, TW;

Inventors:

Tsun-Kai Tsao, Tainan, TW;

Jiech-Fun Lu, Madou Township, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/146 (2006.01);
U.S. Cl.
CPC ...
H01L 27/14623 (2013.01); H01L 27/1463 (2013.01); H01L 27/14683 (2013.01); H01L 27/1464 (2013.01); H01L 27/14627 (2013.01); H01L 27/14629 (2013.01);
Abstract

In some embodiments, the present disclosure relates to an image sensor structure. The image sensor structure includes a substrate. The substrate includes a first side and a second side opposite the first side. A photodetector extends into the first side of the substrate. An isolation structure comprises a first isolation segment and a second isolation segment that extend through the substrate. The first isolation segment and the second isolation segment are respectively on opposite sides of the photodetector and comprise a dielectric. A first metal line is on the first side of the substrate. A dummy contact structure comprises a first dummy segment and a second dummy segment. Both the first dummy segment and the second dummy segment comprise metal and extend from the first metal line to the first isolation segment and the second isolation segment, respectively.


Find Patent Forward Citations

Loading…