The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 20, 2022

Filed:

Feb. 22, 2021
Applicant:

Western Digital Technologies, Inc., San Jose, CA (US);

Inventors:

Jayavel Pachamuthu, San Jose, CA (US);

Kirubakaran Periyannan, Santa Clara, CA (US);

Daniel Linnen, Naperville, IL (US);

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/66 (2006.01); G01R 31/312 (2006.01);
U.S. Cl.
CPC ...
H01L 22/12 (2013.01); G01R 31/312 (2013.01); H01L 22/14 (2013.01); H01L 22/34 (2013.01);
Abstract

A system and method for die crack detection in a CMOS bonded array includes a capacitor that is formed in an edge seal, where one of the capacitor plates is in the edge seal portion of a first wafer, and the other capacitor plate is in the edge seal portion of a second wafer. A crack in the die can be detected by applying an alternating current waveform to a testing contact on the integrated circuit and monitoring for a shift in the alternating current waveform, as a crack would cause modulation in the capacitance.


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