The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 20, 2022
Filed:
May. 23, 2016
Applicant:
Rohm and Haas Electronic Materials Korea Ltd., Chungcheongnam-Do, KR;
Inventors:
Jung-June Lee, Chungcheongnam-Do, KR;
Jae-Bong Lim, Chungcheongnam-Do, KR;
Jun-Han Yun, Chungcheongnam-Do, KR;
Ji-Hoon Kang, Chungcheongnam-Do, KR;
Assignee:
ROHM AND HAAS ELECTRONIC MATERIALS KOREA LTD., Chungcheongnam-Do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/09 (2006.01); G03F 7/038 (2006.01); G03F 7/039 (2006.01); G03F 7/30 (2006.01); G03F 7/26 (2006.01);
U.S. Cl.
CPC ...
G03F 7/091 (2013.01); G03F 7/0382 (2013.01); G03F 7/0397 (2013.01); G03F 7/26 (2013.01); G03F 7/30 (2013.01);
Abstract
Organic coating compositions, particularly antireflective coating compositions for use with an overcoated photoresist, are provided that comprise that comprise a thermal acid generator that comprises: i) a pyridinium component having one or more ring substituents selected from optionally substituted alkyl and optionally substituted heteroalkyl; and ii) a sulfonic acid component.