The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 20, 2022
Filed:
Dec. 04, 2017
Applicant:
Asml Netherlands B.v., AH Veldhoven, NL;
Inventor:
Chiyan Kuan, San Jose, CA (US);
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Primary Examiner:
Int. Cl.
CPC ...
G01N 23/225 (2018.01); H01J 37/22 (2006.01); H01J 37/30 (2006.01); H01J 37/153 (2006.01); H01J 37/21 (2006.01);
U.S. Cl.
CPC ...
G01N 23/225 (2013.01); H01J 37/153 (2013.01); H01J 37/21 (2013.01); H01J 37/222 (2013.01); H01J 37/3005 (2013.01); H01J 2237/004 (2013.01); H01J 2237/0044 (2013.01); H01J 2237/0048 (2013.01); H01J 2237/1538 (2013.01);
Abstract
Systems and methods are provided for dynamically compensating position errors of a sample. The system can comprise one or more sensing units configured to generate a signal based on a position of a sample and a controller. The controller can be configured to determine the position of the sample based on the signal and in response to the determined position, provide information associated with the determined position for control of one of a first handling unit in a first chamber, a second handling unit in a second chamber, and a beam location unit in the second chamber.