The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 20, 2022

Filed:

Oct. 23, 2020
Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;

Inventors:

Yi-Tang Huang, Taichung, TW;

Yuan-Yu Feng, Tainan, TW;

Chia-Han Lin, New Taipei, TW;

Chien-Fa Lee, Hsinchu, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); B60P 1/64 (2006.01); B65D 90/00 (2006.01); H01L 21/677 (2006.01); G06T 7/00 (2017.01); B66C 1/66 (2006.01); H01L 21/68 (2006.01);
U.S. Cl.
CPC ...
B60P 1/6418 (2013.01); B60P 1/6409 (2013.01); B65D 90/0033 (2013.01); B66C 1/663 (2013.01); G06T 7/0008 (2013.01); H01L 21/6773 (2013.01); H01L 21/67259 (2013.01); H01L 21/67769 (2013.01); H01L 21/67775 (2013.01); H01L 21/681 (2013.01); B65G 2203/041 (2013.01);
Abstract

A method for transferring a container configured to hold at least one article used in semiconductor fabrication is provided. The method includes moving a transferring mechanism to a first position that is adjacent to the original space; producing an image of an edge of the container that is adjacent to the original space using an optical receiver before the container is moved to a destination space; and performing an image analysis of the image to determine whether to move the container to the destination space.


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