The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 20, 2022
Filed:
Oct. 26, 2018
Applicant:
Entegris, Inc., Billerica, MA (US);
Inventor:
Daniela White, Ridgefield, CT (US);
Assignee:
ENTEGRIS, INC., Billerica, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B 3/08 (2006.01); B08B 1/00 (2006.01); B08B 1/02 (2006.01); B24B 37/34 (2012.01); C11D 3/30 (2006.01); C11D 3/37 (2006.01); C11D 3/20 (2006.01); C11D 7/34 (2006.01); C11D 7/32 (2006.01); C11D 7/26 (2006.01); B08B 3/04 (2006.01); C11D 11/00 (2006.01); C11D 7/10 (2006.01); A46B 13/00 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
B08B 1/002 (2013.01); A46B 13/00 (2013.01); B08B 1/007 (2013.01); B08B 1/02 (2013.01); B08B 3/04 (2013.01); B08B 3/08 (2013.01); B24B 37/34 (2013.01); C11D 3/2086 (2013.01); C11D 3/30 (2013.01); C11D 3/3765 (2013.01); C11D 7/10 (2013.01); C11D 7/261 (2013.01); C11D 7/265 (2013.01); C11D 7/329 (2013.01); C11D 7/3218 (2013.01); C11D 7/3245 (2013.01); C11D 7/3272 (2013.01); C11D 7/3281 (2013.01); C11D 7/34 (2013.01); C11D 11/0047 (2013.01); H01L 21/67046 (2013.01);
Abstract
Described are methods for removing abrasive particles from a polymeric surface, such as from a polymeric surface of a cleaning brush used in a post chemical-mechanical processing cleaning step, as well as related cleaning solutions.