The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 13, 2022
Filed:
Feb. 19, 2018
Applicant:
Atotech Deutschland Gmbh, Berlin, DE;
Inventors:
Rüdiger Pretscher, Berlin, DE;
Daniel Buchberger, Berlin, DE;
Assignee:
Atotech Deutschland GmbH, Berlin, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); B65G 47/91 (2006.01); C25D 17/06 (2006.01); H01L 21/67 (2006.01); H01L 21/683 (2006.01); H01L 21/687 (2006.01); H02K 7/116 (2006.01); H02K 37/24 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67769 (2013.01); B65G 47/91 (2013.01); C25D 17/06 (2013.01); H01L 21/6723 (2013.01); H01L 21/67766 (2013.01); H01L 21/67778 (2013.01); H01L 21/6838 (2013.01); H01L 21/68707 (2013.01); H02K 7/1166 (2013.01); H02K 37/24 (2013.01);
Abstract
The present invention refers to a substrate holder loading device to be used in a clean room and a clean room treatment device containing such substrate holder loading device. Furthermore, the present invention refers to a method of loading a substrate holder with a first substrate, more preferably with a first and a second substrate.