The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 13, 2022
Filed:
Jan. 04, 2021
Applicant:
Asml Netherlands B.v., Veldhoven, NL;
Inventor:
Ronald Van Der Wilk, Knegsel, NL;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 5/46 (2006.01); C03C 27/04 (2006.01); H01J 5/36 (2006.01); H01J 9/28 (2006.01);
U.S. Cl.
CPC ...
H01J 5/46 (2013.01); C03C 27/048 (2013.01); H01J 5/36 (2013.01); H01J 9/28 (2013.01);
Abstract
A feedthrough for providing an electrical connection is provided. The feedthrough comprises a conductor and a quartz or a glass structure configured to surround at least a portion of the conductor and provide isolation to the conductor. The conductor and the quartz or glass structure may be coaxially arranged. The feedthrough can provide an electrical connection between an inside and outside of a vacuum chamber that contains a sample.