The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 13, 2022
Filed:
Mar. 13, 2020
Nuflare Technology, Inc., Yokohama, JP;
Yoshitaka Yasui, Yokohama, JP;
Ikunao Isomura, Yokohama, JP;
NuFlare Technology, Inc., Yokohama, JP;
Abstract
To include reading design data of a plurality of patterns formed on a sample and characteristic information indicating characteristics of each of the patterns from a storage device, the characteristic information being additionally written in the design data, dividing a pattern formed region of the sample on which the patterns are formed, into a plurality of regions where the characteristics are different from each other on a basis of the characteristic information, calculating parameter information according to the characteristics with respect to each of the regions, where the parameter information is provided for generating a reference image from the design data to be used in an inspection of the patterns, and generating the reference image from the design data on a basis of the calculated parameter information.