The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 13, 2022

Filed:

Mar. 23, 2022
Applicant:

Changxin Memory Technologies, Inc., Hefei, CN;

Inventor:

San-Chen Chen, Hefei, CN;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G05B 19/418 (2006.01); H01L 21/67 (2006.01); H01L 21/68 (2006.01);
U.S. Cl.
CPC ...
G05B 19/4189 (2013.01); G05B 2219/45031 (2013.01); H01L 21/67 (2013.01); H01L 21/68 (2013.01);
Abstract

The present disclosure provides a method and an apparatus of handling a control wafer, a method of testing by using a control wafer, a computer-readable storage medium and an electronic device, and relates to the technical field of semiconductor equipment. The method of handling a control wafer includes: setting different identification numbers for multiple reaction chambers; determining slot numbers of control wafers according to the identification numbers of the reaction chambers; and distributing the control wafers according to the slot numbers of the control wafers and the identification numbers of the reaction chambers.


Find Patent Forward Citations

Chen, San-Chen. (2022). Method and apparatus of handling control wafer, method of testing by using control wafer (U.S. Patent No. 11442440). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11442440

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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