The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 13, 2022

Filed:

Aug. 17, 2018
Applicant:

Nanophoton Corporation, Osaka, JP;

Inventors:

Minoru Kobayashi, Osaka, JP;

Shogo Kawano, Osaka, JP;

Taisuke Ota, Osaka, JP;

Shunichiro Matsuzaka, Osaka, JP;

Yusuke Shiozaki, Osaka, JP;

Shota Yamauchi, Osaka, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 21/00 (2006.01); G02B 21/06 (2006.01); G02B 21/36 (2006.01); G01J 3/06 (2006.01); G01J 3/44 (2006.01); G01N 21/65 (2006.01); G01J 3/02 (2006.01); G01J 3/10 (2006.01);
U.S. Cl.
CPC ...
G02B 21/0048 (2013.01); G01J 3/0208 (2013.01); G01J 3/06 (2013.01); G01J 3/44 (2013.01); G01N 21/65 (2013.01); G02B 21/004 (2013.01); G02B 21/06 (2013.01); G02B 21/361 (2013.01); G01J 2003/104 (2013.01);
Abstract

An optical microscope according to one aspect of the present disclosure includes: a light source; a first scanner to scan a spot position of a light beam on a sample; an objective lens to focus the light beam deflected by the first scanner and cause the light beam to be made incident on the sample; a spectroscope including a slit on an incident side which an outgoing light emitted from an area on the sample onto which the light beam has been illuminated enters; a detector configured to detect an outgoing light from the spectroscope; and a first relay optical system including a first off-axis parabolic mirror that is arranged in an optical path from the first scanner to the objective lens and reflects the light beam deflected by the first scanner and a second off-axis parabolic mirror that reflects the light beam reflected in the first off-axis parabolic mirror.


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