The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 13, 2022

Filed:

Nov. 21, 2019
Applicant:

Panasonic Intellectual Property Management Co., Ltd., Osaka, JP;

Inventors:

Naoya Ryoki, Osaka, JP;

Kentaro Miyano, Osaka, JP;

Masaki Nobuoka, Nara, JP;

Akihiko Ishibashi, Osaka, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/15 (2006.01); C30B 29/26 (2006.01); H01L 29/20 (2006.01); H01L 29/205 (2006.01); C30B 25/18 (2006.01); H01L 21/02 (2006.01); C30B 15/22 (2006.01); C30B 29/40 (2006.01);
U.S. Cl.
CPC ...
C30B 29/26 (2013.01); C30B 15/22 (2013.01); C30B 25/183 (2013.01); C30B 29/406 (2013.01); H01L 21/0242 (2013.01); H01L 21/02458 (2013.01); H01L 29/2003 (2013.01); H01L 29/205 (2013.01);
Abstract

A RAMOsubstrate that does not easily crack during or after the formation of group III nitride crystal includes a single crystal represented by general formula RAMO(wherein R represents one or more trivalent elements selected from the group consisting of Sc, In, Y, and lanthanoid elements, A represents one or more trivalent elements selected from the group consisting of Fe(III), Ga, and Al, and M represents one or more divalent elements selected from the group consisting of Mg, Mn, Fe(II), Co, Cu, Zn, and Cd). The RAMOsubstrate has a crystal plane with a curvature radius r of 52 m or more, and a square value of correlation coefficient ρ of 0.81 or more. The curvature radius r is calculated as an absolute value from X-ray peak position ωi and measurement position Xi after the measurements of X-ray peak positions ωi at a plurality of positions Xi lying on a straight line passing through the center of the RAMOsubstrate. The correlation coefficient ρ is a measure of correlation between ω and measurement position Xi.


Find Patent Forward Citations

Loading…