The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 06, 2022
Filed:
Dec. 11, 2019
Applicant:
Disco Corporation, Tokyo, JP;
Inventors:
Yoshinobu Saito, Tokyo, JP;
Masayuki Matsubara, Tokyo, JP;
Assignee:
DISCO CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/683 (2006.01); H01L 21/67 (2006.01); H01L 21/78 (2006.01); G02F 1/01 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6836 (2013.01); H01L 21/67248 (2013.01); G02F 1/0147 (2013.01); H01L 2221/68327 (2013.01);
Abstract
A workpiece unit includes a wafer, a tape attached to the wafer, and an annular frame to which an outer peripheral edge of the tape is attached and having an opening in a center of the annular frame, and the workpiece unit has the wafer positioned in the opening of the annular frame through the tape. In the workpiece unit, the tape has a color change layer that reversibly changes in color in response to a change in temperature caused by cooling.