The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 06, 2022
Filed:
Mar. 24, 2020
Applicant:
Ngk Insulators, Ltd., Aichi, JP;
Inventors:
Masashi Goto, Aichi, JP;
Masahiro Sakai, Aichi, JP;
Shohei Oue, Aichi, JP;
Takashi Yoshino, Aichi, JP;
Assignee:
NGK INSULATORS, LTD., Nagoya, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); C30B 29/40 (2006.01); H01L 21/20 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02502 (2013.01); C30B 29/403 (2013.01); H01L 21/0254 (2013.01); H01L 21/02354 (2013.01); H01L 21/02414 (2013.01); H01L 21/02458 (2013.01); H01L 21/02675 (2013.01); H01L 21/2026 (2013.01);
Abstract
A base substrate includes a supporting substrate comprising aluminum oxide, and a base crystal layer provided on a main face of the supporting substrate, comprising a crystal of a nitride of a group 13 element and having a crystal growth surface. At lease one of a metal of a group 13 element and a reaction product of a material of the supporting substrate and the crystal of the nitride of the group 13 element is present between the raised part and the supporting substrate. The reaction product contains at least aluminum and a group 13 element.