The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 06, 2022
Filed:
Sep. 16, 2019
Applicant:
Gelest, Inc., Morrisville, PA (US);
Inventors:
Barry C. Arkles, Pipersville, PA (US);
Youlin Pan, Langhorne, PA (US);
Fernando Jove, Collingswood, NJ (US);
Assignee:
GELEST, INC., Morrisville, PA (US);
Primary Examiner:
Int. Cl.
CPC ...
C07F 7/10 (2006.01); C07F 7/08 (2006.01); H01L 21/02 (2006.01); C01B 21/068 (2006.01); C01B 21/082 (2006.01);
U.S. Cl.
CPC ...
C07F 7/10 (2013.01); C01B 21/068 (2013.01); C01B 21/0828 (2013.01); C07F 7/0898 (2013.01); H01L 21/0217 (2013.01); H01L 21/02167 (2013.01); H01L 21/02219 (2013.01);
Abstract
Hydridosilapyrroles and hydridosilaazapyrrole are a new class of heterocyclic compounds having a silicon bound to carbon and nitrogen atoms within the ring system and one or two hydrogen atoms on the silicon atom. The compounds have formula (I): in which R is a substituted or unsubstituted organic group and R' is an alkyl group. These compounds react with a variety of organic and inorganic hydroxyl groups by a ring-opening reaction and may be used to produce silicon nitride or silicon carbonitride films.