The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 06, 2022

Filed:

Jan. 17, 2017
Applicant:

Taiwan Semiconductor Manufacturing Company Ltd., Hsinchu, TW;

Inventors:

Chun-Wen Cheng, Hsinchu County, TW;

Yi-Chuan Teng, Hsinchu County, TW;

Cheng-Yu Hsieh, Hsinchu, TW;

Lee-Chuan Tseng, New Taipei, TW;

Shih-Chang Liu, Kaohsiung County, TW;

Shih-Wei Lin, Taipei, TW;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
B81B 7/00 (2006.01); B81C 1/00 (2006.01); B81B 3/00 (2006.01);
U.S. Cl.
CPC ...
B81B 7/008 (2013.01); B81B 3/0005 (2013.01); B81B 7/0041 (2013.01); B81C 1/00277 (2013.01); B81C 1/00293 (2013.01); B81B 2201/02 (2013.01); B81B 2207/012 (2013.01); B81C 2203/019 (2013.01); B81C 2203/0145 (2013.01); B81C 2203/0172 (2013.01); B81C 2203/0792 (2013.01); H01L 2224/11 (2013.01);
Abstract

A semiconductor structure includes: a first device; a second device contacted with the first device, wherein a chamber is formed between the first device and the second device; a first hole disposed in the second device and defined between a first end with a first circumference and a second end with a second circumference; a second hole disposed in the second device and aligned to the first hole; and a sealing object for sealing the second hole. The first end links with the chamber, and the first circumference is different from the second circumference, the second hole is defined between the second end and a third end with a third circumference, and the second circumference and the third circumference are smaller than the first circumference.


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