The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 30, 2022

Filed:

Jul. 09, 2020
Applicant:

Winbond Electronics Corp., Taichung, TW;

Inventors:

Kai Jen, Taichung, TW;

Hao-Chuan Chang, Taichung, TW;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/108 (2006.01); H01L 29/78 (2006.01); H01L 29/66 (2006.01);
U.S. Cl.
CPC ...
H01L 27/10814 (2013.01); H01L 27/10855 (2013.01); H01L 27/10873 (2013.01); H01L 27/10885 (2013.01); H01L 27/10891 (2013.01); H01L 29/66666 (2013.01); H01L 29/7827 (2013.01);
Abstract

Provided is a DRAM including a substrate, first bit line structures, second bit line structures, and word line structures. The substrate has active regions each including pillar structures arranged along a first direction. Two first bit line structures extended along the first direction and buried in the substrate are disposed between the active regions arranged along a second direction. Each second bit line structure is located between the pillar structures and extended through the active regions along the second direction to be disposed on the first bit line structures and electrically connected to the first bit line structures. The word line structures are disposed on and spaced apart from the second bit line structures. Each word line structure extended along the second direction is located between the pillar structures and passes through the active regions arranged along the second direction. A manufacturing method of the DRAM is also provided.


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