The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 30, 2022
Filed:
Apr. 18, 2019
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Abraham Ravid, San Jose, CA (US);
Kevin Griffin, Livermore, CA (US);
Joseph Yudovsky, Campbell, CA (US);
Kaushal Gangakhedkar, San Jose, CA (US);
Dmitry A. Dzilno, Sunnyvale, CA (US);
Alex Minkovich, Campbell, CA (US);
Assignee:
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); C23C 16/52 (2006.01); H01L 21/687 (2006.01); C23C 16/455 (2006.01); C23C 16/458 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67259 (2013.01); C23C 16/4584 (2013.01); C23C 16/45544 (2013.01); C23C 16/52 (2013.01); H01L 21/67248 (2013.01); H01L 21/68764 (2013.01); H01L 21/68771 (2013.01);
Abstract
Apparatus and methods of measuring and controlling the gap between a susceptor assembly and a gas distribution assembly are described. Apparatus and methods for positional control and temperature control for wafer transfer purposes are also described.