The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 30, 2022
Filed:
Jan. 18, 2018
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventors:
Assignee:
TOKYO ELECTRON LIMITED, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C25D 17/10 (2006.01); C25D 5/00 (2006.01); C25D 17/06 (2006.01); C25D 7/12 (2006.01);
U.S. Cl.
CPC ...
C25D 5/617 (2020.08); C25D 7/123 (2013.01); C25D 17/06 (2013.01); C25D 17/10 (2013.01);
Abstract
An electrolytic treatment apparatus(A) configured to perform an electrolytic treatment on a target substrate includes a substrate holderand an electrolytic processor. The substrate holderincludes an insulating holding bodyconfigured to hold the target substrate and an indirect negative electrodedisposed within the holding body. A negative voltage is applied to the indirect negative electrode. The electrolytic processoris disposed to face the substrate holderand configured to apply a voltage to the target substrate and an electrolyte in contact with the target substrate.