The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 30, 2022
Filed:
Nov. 13, 2019
Kla Corporation, Milpitas, CA (US);
Mark Lin, San Jose, CA (US);
Ben Clarke, Milpitas, CA (US);
KLA Corporation, Milpitas, CA (US);
Abstract
A gripper assembly is disclosed. The gripper assembly includes a stage, a mounting platform, and a plurality of the flexible gripper elements. The flexible gripper element is configured to grip an object. The flexible gripper elements are supported by a first end piece, where the first end piece is attached to the mounting platform. The mounting platform is connected to the stage, where the stage is moveable. The flexible gripper element includes a hollow section that is selectively pressurizable. The hollow section includes one or more zones, where each zone includes chambers which are pressurizable by a fluid input. The selective pressurization of the hollow section allows the flexible gripper element to grip the object.