The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 23, 2022
Filed:
Jul. 08, 2020
Applied Materials, Inc., Santa Clara, CA (US);
Bon-Woong Koo, Andover, MA (US);
Svetlana Radovanov, Brookline, MA (US);
Frank Sinclair, Boston, MA (US);
You Chia Li, Reading, MA (US);
Peter Ewing, South Berwick, ME (US);
Ajdin Sarajlic, Bedford, NH (US);
Christopher A. Rowland, Rockport, MA (US);
Nunzio Carbone, Hamilton, MA (US);
APPLIED Materials, Inc., Santa Clara, CA (US);
Abstract
Provided herein are approaches for increasing efficiency of ion sources. In some embodiments, an apparatus, such as an ion source, may include a chamber housing having a first end wall and a second end wall, and an extraction plate coupled to at least one of the first end wall and the second end wall. The extraction plate may include an extraction aperture. The apparatus may further include a tubular cathode extending between the first end wall and the second end wall.